Dr. Sang-hyun Oh

august, 2018

07aug(aug 7)2:00 pm09(aug 9)4:00 pmDr. Sang-hyun OhUltra-flat and Ultra-small: Towards Atomic-Resolution Engineering of Metallic Nanostructures2:00 pm - 4:00 pm (9)

Event Details

Dr. Sang-hyun Oh

Academic Affiliation: University of Minnesota

Talk: August  7, 2018






Ultra-flat and Ultra-small: Towards Atomic-Resolution Engineering of Metallic Nanostructures

This presentation will cover two unconventional nanofabrication techniques, namely, template stripping for making atomically smooth patterned metals [1-2] and atomic layer lithography for mass-producing sub-10 nm gaps [3-4]. These ‘enabling’ technologies have benefitted numerous applications in nanosciences, and we will show some examples.

Template stripping is widely used to create ultra-smooth metal films, plasmonic gratings, waveguides, high-Q resonators, and ultra-sharp pyramidal tips for near-field optical spectroscopy. In this unconventional process, instead of directly patterning metal films, which are difficult to plasma-etch, we engineer inverse patterns in a silicon template using mature IC processing techniques. After metal deposition and peeling, ultra-smooth patterns in the silicon template are replicated onto the deposited metal film. I will discuss applications of template-stripped metal films for near-field optical spectroscopy, plasmonics, and 2D materials.

Our group has demonstrated a new technique called atomic layer lithography [3-4], which leverages Angstrom-scale thickness resolution of atomic layer deposition to pattern equally small gaps and slits in metal films. Using this new method, we have demonstrated wafer-scale production of ultra-long (up to centimeters) and sub-10-nm wide gaps in various metals. The resulting devices have been used for a wide range of optical and electrical experiments, including extraordinary optical transmission through single-nanometer gaps, optical trapping of protein molecules, and surface-enhanced spectroscopies, to name a few. I will present broader potential applications of this technology.

[1] P. Nagpal, N. C. Lindquist, S.-H. Oh, D. J. Norris, Science (2009), 325, 594.
[2] T. W. Johnson, Z. J. Lapin, R. Beams, N. C. Lindquist, S. G. Rodrigo, L. Novotny, S.-H. Oh. ACS Nano (2012) 6, 9168.
[3] H. Im, K. C. Bantz, N. C. Lindquist, C. L. Haynes, S.-H. Oh, Vertically oriented sub-10 nm plasmonic nanogap arrays, Nano Letters 10, 2231 (2010).
[4] X. Chen, H. Park, M. Pelton, X. Piao, N. C. Lindquist, H. Im, Y.J. Kim, J.S. Ahn, K.J. Ahn, N. Park, D.S. Kim, and S.-H. Oh. Nature Communications (2013) 4, 2361


7 (Tuesday) 2:00 pm - 9 (Thursday) 4:00 pm

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